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采用多靶共焦射频磁控溅射制备不同调制比的NbSiN/VN多层膜。利用X射线衍射、扫描电镜、能量色散谱、纳米压痕仪及摩擦试验机对薄膜的成分、相结构、力学及摩擦性能进行分析。结果表明,NbSiN/VN多层膜为fcc与hcp混合结构,NbSiN/VN多层膜的显微硬度随VN调制层厚度的增加而逐渐降低,室温条件下,以Al2O3为摩擦副的NbSiN/VN多层膜平均摩擦系数受调制比影响显著,随VN层厚度的增加,多层膜平均摩擦系数先降低后保持稳定。
Multi-target confocal RF magnetron sputtering was used to prepare NbSiN / VN multilayers with different modulation ratios. The composition, phase structure, mechanical properties and tribological properties of the films were analyzed by X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy, nanoindentation and friction tester. The results show that the NbSiN / VN multilayers are mixed by fcc and hcp, and the microhardness of NbSiN / VN multilayers decreases with the increase of the thickness of the VN modulation layer. At room temperature, NbSiN / VN The average friction coefficient of multi-layer film is significantly affected by the modulation ratio. With the increase of VN layer thickness, the average friction coefficient of multi-layer film first decreases and then remains stable.