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埚帮是单晶硅直拉炉中最重要的结构损耗件,随着直拉法热场尺寸的不断增大,主流单晶硅制造企业已经大批量采用炭/炭复合材料埚帮替代石墨埚帮。采用针刺法制备毛坯预制体,经化学气相沉积、树脂浸渍炭化增密和高温纯化处理后制成炭/炭复合材料埚帮。根据热场温度及元素分析炭/炭埚帮侵蚀破坏的机理,对使用后的炭/炭埚帮断口进行观察分析,结合反应机理进而推断影响埚帮使用寿命的主要因素,为提高炭/炭埚帮寿命的设计提供参考。
Crucible is the most important single crystal silicon furnace pull structure loss pieces, with the Czochralski thermal field size continues to increase, the mainstream of single crystal silicon manufacturers have been using large quantities of carbon / carbon composite crucible to replace graphite crucible help. The acupuncture method is adopted to prepare the preform, and the carbon / carbon composite crucible is prepared by chemical vapor deposition, resin impregnation carbonization and high temperature purification. According to the thermal field temperature and elemental analysis of carbon / carbon crucible to help the erosion and erosion mechanism, the use of carbon / carbon crucible fracture analysis and observation, combined with the reaction mechanism and then infer the main factors that affect the crucible life, in order to improve the charcoal / charcoal Crucible life design to provide a reference.