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在电子显微镜中,电子束通路污染将造成终象障碍。由于第一,电子束通路中有很多部件,包括聚光镜可动光栏、聚光镜固定光栏、物镜光栏、物镜消象散器屏蔽筒、防污染帽、中间镜和投影镜光栏等;第二,这些部件中任一部件污染,从对终象造成障碍来讲是等效的,这就给判断镜筒中污染部位造成了困难,同时也突出了正确识别镜筒污染部位的重要性。因为否则,不仅不能迅速排除故障,而且会因反复拆装镜筒而诱发出新污染或其它障碍。本文根据电子光学原理和工作经验,介绍一种分析镜筒污染部位的方法和程序,并以JEM-1200EX透射电镜为例说明。
In electron microscopy, contamination of the electron beam path causes end-point obstructions. First, there are many components in the electron beam path, including the condensing lens movable diaphragm, condenser fixed diaphragm, objective optical shutter, objective lens defocuser shielding cylinder, anti-pollution cap, intermediate mirror and projection mirror plate, etc .; Second, the pollution of any one of these components is equivalent to the obstacle to the final image, which makes it difficult to judge the contaminated site in the lens barrel and highlights the importance of correctly identifying the contaminated site of the lens barrel. Because otherwise, not only can not quickly eliminate the malfunction, but also because of repeated disassembly tube induced new pollution or other obstacles. Based on the principles of electronic optics and working experience, this paper introduces a method and procedure for analyzing the contaminated site of the lens barrel. The TEM image taken by JEM-1200EX is taken as an example.