论文部分内容阅读
本文应用背散射沟道技术研究了低能离子轰击不同晶向表面所引起的晶格损伤与离子能量、剂量的关系,讨论了损伤形成的动力学过程。
In this paper, we studied the relationship between lattice damage and ion energy and dose caused by low energy ions bombarding different crystal surfaces by using backscattering channel technique. The kinetic process of damage formation was discussed.