论文部分内容阅读
为了增加天线带宽,提高天线机械稳定性,改善天线性能,提出并设计制作了一种工作在35GHz的硅基MEMS渐变式缝隙天线。针对渐变式缝隙天线在毫米波频段介电常数高、衬底极薄、易碎、不易制作等问题,利用ICP深刻蚀工艺在衬底上形成了周期性通孔阵列,从而减小了衬底有效介电常数,增加了衬底厚度,同时利用共面波导-槽线对该天线进行馈电。仿真结果表明,该天线带宽为28.2%,增益为8.7dB。采用微机械工艺对该天线进行加工,测得其带宽为13.2%。与传统天线相比,该天线进一步提高了天线衬底的机械稳定性,增加了天线带宽,且易于集成。
In order to increase the antenna bandwidth, improve the mechanical stability of the antenna and improve the performance of the antenna, a silicon-based MEMS graded slot antenna operating at 35 GHz is proposed and designed. Aiming at the problems of high dielectric constant of millimeter-wave frequency band, extremely thin substrate, fragile substrate and difficult to fabricate, the progressive slot antenna has a periodic pattern of through-holes formed on the substrate by ICP deep etching process, so as to reduce the substrate The effective dielectric constant increases the substrate thickness while feeding the antenna with coplanar waveguide-slot lines. The simulation results show that the antenna bandwidth is 28.2% and the gain is 8.7dB. The antenna was machined using a micromechanical process and its bandwidth was measured at 13.2%. Compared with the traditional antenna, the antenna further improves the mechanical stability of the antenna substrate, increases the antenna bandwidth, and is easy to integrate.