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设计了一种微波介质波导探头用于无接触测量半导体薄片样品的霍尔迁移率。它具有体积小、被测薄片样品大小不受限制等优点。在直流磁场变化时,无接触测试了一组n型硅薄片样品的横向磁阻,讨论了磁阻的计算方法及考虑样品的晶向后,由磁阻计算霍尔迁移率的方法,实验测试及计算结果是较为满意的。
A microwave dielectric waveguide probe was designed for non-contact measurement of Hall mobility in semiconductor thin-film samples. It has the advantages of small size, unrestricted sample size of the tested slice and so on. In the case of DC magnetic field, the transverse reluctance of a group of n-type silicon wafers was tested without contact. The calculation method of reluctance and the method of calculating the Hall mobility by reluctance were taken into account. The experimental test And the calculation result is more satisfactory.