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在车间条件下操作时,光栅干涉仪在测量精度方面优于He-Ne激光干涉仪。基于光栅干涉测量系统有一些特别的优点,导致其在高精密测量中用途不断增加。阐述了衍射式光栅干涉测量系统的工作原理和特点,同时详细总结了国际上生产和研究衍射光栅干涉测量系统的厂家和研究机构及他们的产品。并指出该系统的发展趋势和存在的问题,为衍射式光栅测量系统的研究和发展提供参考。
The grating interferometer is superior to the He-Ne laser interferometer in terms of measurement accuracy when operating in a shop floor. The grating-based interferometry system has some special advantages that have led to its increasing use in high-precision measurements. The working principle and characteristics of the diffraction grating interferometry system are described. Meanwhile, the manufacturers and research institutes and their products producing and studying diffraction grating interferometry systems in the world are summarized in detail. And points out the development trend and the existing problems of this system, and provides references for the research and development of the diffraction grating measurement system.