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主动抗振技术是目前抗振干涉仪中研究的难点,其代价小、易于实现的方案是机电反馈式。在这种技术中振动信号的探测很关键,基于文中提出的采用单个光电二极管探测相位的抗振技术,获取的相位量数字化后由数字信号处理器分析得到应该补偿的振动量,送压电陶瓷(PZT)进行补偿。论述了系统各部分的工作原理和电路设计,并给出了实验结果。实验表明,本方案对于小于100wave·Hz的振动具有较好的效果。
Active anti-vibration technology is the current anti-vibration interferometer research difficulties, the cost is small, easy to implement the program is electromechanical feedback. In this technology, the detection of the vibration signal is very important. Based on the anti-vibration technology proposed in this paper, which uses a single photodiode to detect the phase, the acquired phase amount is digitized and analyzed by the digital signal processor to obtain the amount of vibration to be compensated. (PZT) to compensate. The working principle and circuit design of each part of the system are discussed, and the experimental results are given. Experiments show that this scheme has a good effect on the vibration of less than 100wave · Hz.