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使用非平衡磁控溅射方法，以Ｃ２Ｈ２为反应气，Ｃ２Ｆ２为氟化气沉积了含氟和不含氟的类金刚石（ＤＬＣ）薄膜。用Ｘ射线光电子谱仪（ＸＰＳ）及Ｒａｍａｎ光谱仪分析薄膜的成分及结构。试验了薄膜的力学性能并讨论了组织结构对性能的影响。结果表明，含氟ＤＬＣ仍具有典型的ＤＬＣ的Ｒａｍａｎ光谱特性。氟降低薄膜中的Ｉ（Ｄ）／Ｉ（Ｇ）比率，使薄膜中的ＳＰ３键相对含量下降。随着氟含量的增加，ＤＬＣ的硬度下降，摩擦系数减小。适当含量Ｆ元素可以提高薄膜划痕试验的临界负荷，增加薄膜与基体的结合强度。
Using non-equilibrium magnetron sputtering method, C2H2 as the reactive gas, C2F2 fluoride gas deposition of fluorine-containing and fluorine-free diamond-like carbon (DLC) film. The composition and structure of the films were analyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The mechanical properties of the films were tested and the effect of the microstructures on the properties was discussed. The results show that the fluorine-containing DLC still has the typical Raman spectra of DLC. Fluorine reduces the I (D) / I (G) ratio in the film and decreases the relative content of SP3 bonds in the film. As the fluorine content increases, the hardness of DLC decreases and the friction coefficient decreases. The appropriate content of F elements can improve the critical load of the film scratch test and increase the bonding strength between the film and the substrate.