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定性地讨论了微机械音叉陀螺特有的一些误差源,主要有机械结构的 Brownian噪声、电路噪声、机械耦合误差及电子机械耦合误差等.对上述误差源的认识是微结构制造和电路设计的基础。
Some error sources that are specific to micromechanical tuning fork gyroscope are discussed qualitatively, including Brownian noise of mechanical structure, circuit noise, mechanical coupling error and electromechanical coupling error. The understanding of these sources of error is the foundation of micro-fabrication and circuit design.