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六方相ZnS由于光学上的各相异性而在不同晶相上具有不同的折射指数。立方相化学气相沉积硫化锌(CVDZnS)中的六方杂相加大了对入射光线的散射,严重影响材料本身的光学性能。通过不同实验条件下的对比,对促成立方相形成的机制进行了探讨和分析,证实了六方相的形成主要受沉积温度、沉积压力、Zn/H2S 3个沉积参数的影响。有针对性地提出了综合利用适当提高沉积温度、Zn/H2S和降低沉积压力等方式来抑制六方相生成的方法,制备出不含六方杂相且各向同性的CVDZnS。样品的红外透过率在近红外及中红外波段得到了改善。
The hexagonal ZnS has different refractive indices on different crystalline phases due to their optical anisotropy. The cubic phase of chemical vapor deposition of zinc sulfide (CVDZnS) hexagonal heterophase increases the incident light scattering, seriously affecting the optical properties of the material itself. Through the comparison under different experimental conditions, the mechanism of the formation of cubic phase was discussed and analyzed. It was confirmed that the formation of hexagonal phase was mainly affected by the deposition temperature, deposition pressure and Zn / H2S deposition parameters. Aiming at the comprehensive utilization of the methods of increasing the deposition temperature, Zn / H2S and reducing the deposition pressure to suppress the hexagonal phase synthesis, the isotropic CVDZnS with no hexagonal heterogeneous phase was prepared. The infrared transmittance of the samples has been improved in the near-infrared and mid-infrared bands.