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报道了近场扫描光学显微镜(NearfiledScanningOpticsMicroscopeNSOM)中一种基于切变力的探针样品间距控制新方法条形压电蜂鸣器片的上表面电极被沿着中心线分成两半,一半用于驱动,其上施加振荡源谐振频率进行激励,另一半上粘附光纤探针,并利用压电效应作为光纤探针的振幅传感器当受振动激励的光纤探针由远处逐渐接近样品表面时,由于样品与探针之间的切变力阻尼作用使得探针的振幅减小,通过检测探针振幅的变化可以控制探针与样品的间距我们建立了一套探针样品间距探测控制系统并利用该系统获得了CD盘片表面8μm×8μm范围内的切变力形貌图
Reported a near-field scanning optical microscope (Near-scanningScanningOpticsMicroscope-NSOM) a shear-based probe-sample spacing control method strip piezoelectric buzzer on the surface of the electrode is divided along the centerline is divided into two Half and half are used for driving, the excitation source is applied with the resonant frequency of excitation source, the other half is bonded with fiber probe, and the piezoelectric effect is used as the amplitude sensor of fiber probe. When the fiber probe excited by vibration is far Gradually approaching the surface of the sample, the probe’s amplitude is reduced due to the damping effect of the shear force between the sample and the probe. The probe-to-sample spacing can be controlled by detecting changes in the probe amplitude. We have established a set of probes sample spacing detection and control system and the use of the system obtained CD disc surface 8μm × 8μm shear force topography