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本文提出了一种测量超光滑表面轮廓的绝对测量方法。采用微分干涉显微镜直接测量表面轮廓的差分，从而无需使用标准参考反射镜，并能有效地抑制机械振动等环境干扰对测量结果的影响。在不采取隔振和恒温等环境控制措施的一般实验室场合下，就可达到优于０．１ｎｍ的垂直分辨率和０．１５ｎｍ的表面轮廓重复测量精度。
This paper presents an absolute measurement of ultra-smooth surface profile measurement method. Differential interference microscopy directly measures the difference in surface profile, eliminating the need for a standard reference mirror and effectively suppressing the effects of environmental disturbances such as mechanical vibrations on the measurement results. The vertical resolution of better than 0.1nm and repetitive measurement of the surface profile of 0.15nm can be achieved without the use of general laboratory environment control measures such as vibration isolation and constant temperature.