论文部分内容阅读
我们曾在我厂1973年第三期《光学与计量》上对于在动态光刻法中采用双重胶尺坯问题作过一般介绍。之后又经过一段时间的实验研究以及在机上进行实刻,无论从线纹质量和精度来讲,证明采用双重胶尺坯有利于提高产品质量。本文比较详细地将有关双重胶问题作一介绍。
We have made a general introduction to the problem of using dual plastic billet in the dynamic photolithography on the third edition of “Optics and Metrology” of our factory in 1973. After a period of experimental research as well as real engraving on the machine, it is proved that the double plastic ruler helps to improve the quality of products in terms of the quality and accuracy of the ruled lines. This article will be more detailed on the double glue problem for an introduction.