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利用模块化设计思想,在Matlab编程环境下实现了基于多条耦合器双声路声表面波器件的设计仿真平台。为了提高MSC双声路SAW器件的性能,该平台将多条耦合器、分裂指及假指设计方案融合到器件设计中。多条耦合器不仅实现了两个变迹换能器传递函数的乘积,而且消除了体声波对器件性能的影响。假指消除了通过变迹换能器引起的波前畸变。分裂指可以最小化换能器内部的声波反射问题。通过一个频率为203.559MHz的基于多条耦合器双声路声表面波器件的设计和实际测试结果的对比分析,证明了该设计仿真平台不仅可以进行器件版图结构的设计和模拟,而且设计平台所得到的版图和数据可以用于器件的掩膜版制作和器件封装尺寸参考。另外,该仿真设计平台可以很好地实现对器件的脉冲特性、频率响应特性的模拟和仿真。
Using the modular design idea, the design simulation platform based on the multi-couple two-way acoustic surface acoustic wave device is realized under the Matlab programming environment. In order to improve the performance of MSC dual-channel SAW devices, the platform incorporates multiple couplers, split fingers, and fake finger designs into the device design. Multiple couplers not only realize the product of the transfer functions of two apodized transducers, but also eliminate the effect of bulk acoustic wave on the performance of the device. The fake finger removes the wavefront distortion caused by the apodization transducer. Split fingers can minimize acoustic reflections inside the transducer. Through a comparison of the design and actual test results of a multi-couple two-way SAW device with a frequency of 203.559MHz, it is proved that the design simulation platform can not only design and simulate the device layout structure, but also can be obtained from the design platform The layout and data can be used for mask making and device package size reference. In addition, the simulation platform can well simulate and simulate the pulse characteristics and frequency response characteristics of the device.