在由溶胶凝胶法制备的纳米ZnO薄膜基底上,采用化学溶液沉积法制备了单分散、高度取向的ZnO纳米棒阵列膜.通过控制纳米ZnO薄膜的制备工艺,可以调节氧化锌纳米棒的直径.利用FESEM,TEM,HRTEM,SAED和XRD表征了氧化锌纳米棒阵列的形貌和晶体结构.ZnO纳米棒的室温PL谱具有很高的紫外带边发射峰,在可见光波段无发射峰,表明该方法制备的ZnO纳米棒晶体结构完整,晶体中O空位的浓度很低. Monodispersed and highly oriented ZnO nanorod array films were prepared by chemical solution deposition on the nano-ZnO film substrate prepared by sol-gel method. By controlling the preparation process of ZnO thin films, the diameter of ZnO nanorods The morphology and crystal structure of ZnO nanorod arrays were characterized by FESEM, TEM, HRTEM, SAED and XRD.The room temperature PL spectra of ZnO nanorods have high ultraviolet band edge emission peak and no emission peak in the visible band, The prepared ZnO nanorod crystal structure is complete, and the concentration of O vacancies in the crystal is very low.