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紫外波段薄膜的研究在军事和民用领域都具有重要意义。国内外对该波段薄膜的研制多采用高、低折射率材料交替镀制的介质膜层结构,其缺点为对可见光截止度不好,易产生背景噪声。针对此问题从膜系设计理论出发,在对紫外薄膜材料特性、膜系优化设计技术、沉积技术、测试技术等方面进行研究的基础上采用紫外诱导透射滤光片的结构,并通过反复的理论计算与模拟实验,优化了材料的工艺参数,最终制备出在265nm处透过、300～1000nm波段截止的紫外滤光片。
The study of the ultraviolet band thin film is of great significance both in military and civil fields. At home and abroad for the development of the band of thin film multi-use high and low refractive index material alternately plated dielectric film structure, the disadvantage of the visible light cut-off is not good, easy to produce background noise. Based on the theory of membrane system design, based on the research on the characteristics of UV thin film material, the optimal design of film system, deposition technology and testing technology, the structure of UV-induced transmission filter is adopted. Through repeated theory Computational and simulation experiments were carried out to optimize the technological parameters of the material. Finally, an ultraviolet filter which was transmitted at 265 nm and cut off at 300 ~ 1000 nm was prepared.