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分析了薄膜热电偶的性能和技术特点,阐述了敏感膜的制作方法、薄膜热电偶工艺方法和质量控制,以及有关新技术的应用与发展。国内外研究结果表明:先进的薄膜热电偶能够承受恶劣的试验环境,是成功解决航空发动机涡轮叶片表面温度测量的理想方法。
The performance and technical characteristics of the thin film thermocouple are analyzed. The fabrication methods of the sensitive film, the method and quality control of the thin film thermocouple and the application and development of the new technology are described. The research results at home and abroad show that the advanced thin film thermocouple can withstand the harsh test environment and is an ideal method to successfully solve the surface temperature measurement of aeroengine turbine blade.