【摘 要】
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Indium-composition fluctuations in InGaN epitaxial layers are suppressed by using periodically-pulsed mixture (PPM) of N2 and H2 carrier gas. Photoluminescence,
【机 构】
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State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou
论文部分内容阅读
Indium-composition fluctuations in InGaN epitaxial layers are suppressed by using periodically-pulsed mixture (PPM) of N2 and H2 carrier gas. Photoluminescence, optical transmission, reciprocal space map and space-resolved cathodolu-minescence are employed to characterize the InGaN epilayers. It is shown that the lateral In-fluctuations mainly occur as hillock-like In-rich regions. Both the number and size of In-rich regions are reduced by introducing the PPM carrier gas. Moreover, the measurements first experimentally demonstrate that the H2 carrier gas has a stronger decomposition effect on the In-rich region. As the duration time of the PPM carrier gas increases, the reduction of In-content in the In-rich region reaches up to 12%, however, only 2% for the In-homogeneous region. These factors lead to the suppression of In-fluctuations.
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