电子探针微区分析仪是运用电子所形成的探测针(细电子束)作为X射线的激发源进行显微X射线光谱分析的设备。利用它分析固体物质表面细小颗粒或微小区域,最小范围为直径1微米左右。若进行扫描观察,可以直接显示出样品表面一平方微米至几平方毫米范围内元素的分布状态,可探测到元素周期表上元子序号12的Mg至92的U。它在分析样品过程中具有不 Electronic probe micro-analyzer is the use of the probe formed by the electron (fine electron beam) as the X-ray excitation source for micro X-ray spectrometry equipment. Use it to analyze small particles or tiny areas of solid material surface, the smallest range of about 1 micron in diameter. Scanning can directly reveal the distribution of elements in the range of one square micrometer to several square millimeters on the surface of the sample, and can detect Mg of 92 to 92 U of element number 12 on the periodic table. It has no in the process of analyzing samples