前言气相色谱法具有简单、快速的特点,国内外已有许多分析工作者用以测定三氯氢硅。由于三氯氢硅遇水分解,因此进样方法和防止鉴定器腐蚀是分析中的关键。为此我们试制了液体进样阀,并采用涂金钨丝代替钨丝。初步建立了HCl,SiH_2Cl_2,SiHCl_3,SiCl_4的色谱分析方法。试验装置 SiHCl_3及其杂质均具有腐蚀性,尤其热导池的热敏元件(钨丝)更易被腐蚀损坏。为了延长使用寿命, Preface Gas chromatography has the characteristics of simple, fast, many analysts at home and abroad have been used to determine trichlorosilane. Due to the decomposition of trichlorosilane water, so the injection method and prevent the detector corrosion is the key to the analysis. To this end, we piloted a liquid injection valve, and coated with tungsten wire instead of tungsten wire. The chromatographic analysis of HCl, SiH_2Cl_2, SiHCl_3 and SiCl_4 was initially established. Experimental equipment SiHCl_3 and its impurities are corrosive, especially thermal conductivity cell (tungsten wire) more vulnerable to corrosion damage. In order to extend the service life,