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目前,国内生产的扩散硅压力传感器的硅膜片大多数为圆形膜片。然而,同圆形膜片相比,方形和长方形膜片不仅具有更高的灵敏度,而且给膜片的加工制造带来了方便。下面具体分析三种形状膜片在均布压力作用下其最大应力分布。 1.圆形膜片在均布压力作用下,圆形硅膜片弹性曲面所满足的微分方程为 l/r d/(dr){rd/(dr)[l/r d/(dr)(r(dω)/(dr))]}=q/D (1)式中,ω为膜片挠度;q为膜片承受的均布压力;D为膜片的弯曲刚度,D=Eh～3/12(1-μ～2);h为膜片的厚度;E为膜片材料的杨氏模量;μ为材料的泊桑比。
At present, most of the domestically manufactured silicon diaphragm pressure sensors have a round diaphragm. However, square and rectangular diaphragms not only have higher sensitivity than circular diaphragms, but also facilitate the manufacture of the diaphragms. The following specific analysis of the three shapes of the diaphragm in uniform pressure under the maximum stress distribution. 1. The circular diaphragm in the uniform pressure, the circular silicon diaphragm elastic curved surface satisfy the differential equation l / rd / (dr) {rd / (dr) [l / rd / (dr) (r ( (1) where ω is the deflection of the diaphragm, q is the uniform pressure to be applied to the diaphragm, D is the bending stiffness of the diaphragm, D = Eh ~ 3/12 (1-μ ~ 2); h is the thickness of the diaphragm; E is the Young’s modulus of the diaphragm material; and μ is the Poisson’s ratio of the material.