前言将微位移或微间距等物理量转换成气动参量(压力 P、流量 Q)的元件称谓气动传感器。通常这些微量是用机械式量具来检测的,但测量精度不高,当采用气动传感器作为探头,并组成一套气动测量系统(方框图见图1)后,可以实现精密测量,实验表明,气动传感器能够分辨0.1μ的位移量。 Preface The micro-displacement or micro-spacing and other physical quantities converted into aerodynamic parameters (pressure P, flow Q) of the element called pneumatic sensors. Usually these traces are detected by mechanical gauges, but the measurement accuracy is not high. When the pneumatic sensor is used as the probe and a set of pneumatic measuring system (block diagram shown in Figure 1), can achieve precise measurements, the experiment shows that the pneumatic sensor It can distinguish 0.1μ displacement.