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X光能谱仪在低束流条件下能对Z≥11的所有元素作快速无标样微区定量分析,而且适合于比较粗糙的表面分析,故其应用日益扩大。但能谱分析的准确度较波谱低,故能谱工作者应掌握日常所操作仪器其分析误差最小的测试条件,从而提高分析结果的准确性。本方法是在EXAC—2000/DX系统上试验的,原则上可在各类能谱仪上应用。按本方法所定出的测试条件对一般样品作无标样定量分析,其相对误差通常可在70％以下。
The X-ray spectrometer can rapidly analyze all kinds of elements with Z≥11 under the condition of low beam current, and is suitable for the rough surface analysis. Therefore, its application is expanding day by day. However, the accuracy of spectrum analysis is lower than that of the spectrum. Therefore, spectrum workers should master the test conditions with the lowest analysis error in the instrument they operate daily, so as to improve the accuracy of the analysis results. This method is tested on the EXAC-2000 / DX system and can in principle be used on various types of spectrometers. According to the method set forth in the test conditions for standard samples without standard quantitative analysis, the relative error can usually be below 70%.