材料微观结构的不均匀性往往对材料性质产生重大影响,例如杂质或(和)合金元素向界面(如自由表面,晶界等)狭窄区域偏聚,使韧性材料变脆或造成金属腐蚀。由于偏聚的范围一般只有几个原子层,所以电子探针、自射照相、化学浸蚀等技术均不能检测。近十年来,俄歇电子能谱分析(AES)已经发展成为研究材料表面性质的有力工 Inhomogeneous nature of the material microstructure often have a material impact on the material properties, such as impurities or (and) alloying elements to the interface (such as free surface, grain boundaries, etc.) narrow areas of segregation, the brittle material or cause brittle ductile metal corrosion. As the segregation range generally only a few atomic layers, so electron probe, self-radiography, chemical etching and other technologies can not detect. For nearly a decade, Auger electron spectroscopy (AES) has evolved into a powerful tool for studying the surface properties of materials