论文部分内容阅读
真空计不确定度计算主要涉及需要校准的工作用热传导真空计和电离真空计等,因此,通常用于不确定度计算的技术依据主要是JJF1050-1996《工作用热传导真空计校准规范》和JJF1062-1999《电离真空计校准规范》。其他地方规范或部门规范等都与其类似。在JJF1050-1996之16.4项中和JJF1062-1999之5.3.3.5项中均提到了压力示值相对误差的概念,而压力示值的相对扩展不确定度即是由此衍生而来,与之相类似的一个百分比概念。压力示值相对误差公式如
The calculation of the uncertainty of the vacuum gauge mainly involves the working heat conduction vacuum gauge and the ionization vacuum gauge that need to be calibrated. Therefore, the technical basis commonly used for the calculation of the uncertainty is mainly JJF1050-1996 “Working Heat Conduction Gauge Calibration Specification” and JJF1062 -1999 “calibration gauge ionization gauge.” Other local norms or departmental norms are similar. The concept of relative error of pressure indication is mentioned in item 16.4 of JJF1050-1996 and item 5.3.3.5 of JJF1062-1999, and the relative expansion uncertainty of pressure indication is derived from it A similar percentage concept. Pressure indication relative error formula such as