螺旋波等离子体是一种高密度的低温低气压等离子体。利用一种环绕于玻璃管或石英管外壁的射频天线与磁化等离子体中的右旋极化波的共振 ,可以非常有效地通过朗道吸收加热电子 ,产生高密度等离子体。本文介绍了一种玻璃系统的螺旋波等离子体的发生装置 ,这在国内尚属首次。利用朗廖尔双探针法初步研究了该螺旋波等离子体的特性。估计该等离子体中心区等离子体密度可超过 1× 1 0 12 cm-3 。 Spiral wave plasma is a high-density low-temperature and low-pressure plasma. Using a resonance of the rf antenna in the outer wall of the glass tube or quartz tube with the dextrorotatory polarization in the magnetized plasma, heating electrons can be absorbed very efficiently by Landau to produce a high-density plasma. This article describes a glass system spiral wave plasma generating device, which is the first time in China. The characteristics of this helical wave plasma were preliminary studied by the Langlier double probe method. It is estimated that the plasma density in the central region of the plasma may exceed 1 × 10 12 cm -3.