将传感器与电路集成在同一个芯片上具有体积小、噪声小等优点 ,因而收到了广泛的重视。本文介绍了硅热流量传感器的基本原理及发展状况 ,并针对电路和传感器集成的过程中出现的问题进行了探讨 ,对该类传感器的设计有一定的参考价值。 The sensor and the circuit integrated in the same chip with small size, low noise, etc., which received widespread attention. This paper introduces the basic principle and development status of the silicon thermal flow sensor, discusses the problems in the process of circuit and sensor integration, and has certain reference value for the design of this kind of sensor.