论文部分内容阅读
本工作中把硅烷的吸附提纯与低温蒸馏提纯方法紧密地结合制取了高纯硅烷气体,同时对钢瓶包装的容器作电镀处理,保证了高纯硅烷气不被容器所沾污,从而保证了气体的质量。目前已把上述方法用于生产中,钢瓶充装的高纯硅烷气使用方便,能满足半导体器件工业的需要,对LPCVD(低压化学蒸气淀积)薄膜新工艺的推广,亦起了推动和促进作用。
In this work, the silane adsorption purification and cryogenic distillation purification method closely combined to obtain high-purity silane gas, while the cylinder packaging containers for electroplating treatment to ensure that the high-purity silane gas is not contaminated by the container, thus ensuring the The quality of the gas. At present, the above method has been used in the production. The high-purity silane gas filled in the cylinders is easy to use and can meet the needs of the semiconductor device industry. The popularization of the new LPCVD film process also promotes and accelerates effect.