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该文研究了一种覆盖六氟-2-羟基异丙基聚硅氧烷(SXFA)敏感膜,并针对有机磷化学物检测的新型Love波传感器,采用36°YX-LiTaO3与SiO2分别作为Love波延迟线器件的压电基底与波导层材料。将所研制的Love波器件作为差分振荡器的频率控制单元,结合SXFA敏感膜,开展了针对甲基磷酸二甲(DMMP)的气体传感实验,分析了不同波导层膜厚对Love波传感器气体响应的影响,并与传统瑞利型声表面波模式的气体传感器性能进行了对比,实验结果显示,Love波模式传感器表现出高灵敏度特性。
In this paper, a new type of Love wave sensor covering hexafluoro-2-hydroxyisopropyl polysiloxane (SXFA) sensitive membrane and detecting for organophosphorus chemicals was studied. 36 ° YX-LiTaO3 and SiO2 were used as Love Piezoelectric Substrate and Waveguide Layer Materials for Wave Delay Devices. The developed Love wave device as the frequency control unit of the differential oscillator, combined with SXFA-sensitive membrane, carried out a gas sensing experiment for DMMP, and analyzed the influence of different waveguides’ thickness on the Love wave sensor gas Response, and compared with the performance of traditional Rayleigh SAW mode gas sensors. The experimental results show that Love wave mode sensors exhibit high sensitivity.