论文部分内容阅读
微电子工业和半导体工业都需要高质量的超纯水,如果超纯水水质达不到要求,就会影响产品的质量。水质标准以前电子工业所用的去离子水只要求除去水中的离解盐类,传统所称的纯水,只要求水的电阻率为18兆欧姆·厘米(下面简称18兆欧)。随着现代技术的发展,单纯的去离子水已经不能满足新型微电子工业和半导体工业的要求,必须规定超纯水
Both the microelectronics industry and the semiconductor industry require high-quality ultrapure water. If the ultrapure water quality does not meet the requirements, it will affect the quality of the product. Water Quality Standards Deionized water previously used in the electronics industry only required the removal of dissociated salts in water. The traditionally known pure water requires only a water resistivity of 18 megaohm-centimeters (hereinafter referred to as 18 megohms). With the development of modern technology, pure deionized water can no longer meet the requirements of the new microelectronics industry and the semiconductor industry, and ultra-pure water must be specified.