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对支承硅微谐振器的两种弹性系统———直脚型和蟹脚型结构进行了全面的力学分析 ,给出了应力、位移及弹性常数等力学参量的计算方法 ,对两种结构进行了比较 ,并对蟹脚型结构进行了优化设计 ,优化后的结构其应力位移比值σmax/x的最小值可达2 .594MPa/μm 分析结果对硅微结构的设计具有一定的指导意义
Two kinds of elastic systems supporting silicon microresonator --- straight leg type and crab leg type structure are analyzed comprehensively. The calculation methods of mechanical parameters such as stress, displacement and elastic constant are given. The optimum design of the structure of crab legs is also given. The minimum stress-displacement ratio σmax / x of the optimized structure is up to 2.594 MPa / μm. The results of the analysis have certain guiding significance for the microstructure design of silicon