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介绍了国家自然科学基金重点资助项目“微型机械制造基础理论及基础技术研究”中“微小型泵的基础技术”及其后续工作的研究成果，并结合微流量系统研究分析了当前微型机电系统发展的几个特点。微型机电系统的重要基础课题的研究突破为其发展和应用打下基础。国际上微型光机电系统技术刚走向全面发展，正是我国发展该领域的好时机。
This paper introduces the basic technology of micro-pump and its follow-up work in “Fundamental Theory and Basic Technology of Micro-machine Manufacturing” funded by the National Natural Science Foundation of China, and analyzes the development of the current micro-electro-mechanical system Several features. The breakthrough of the research on the important basic topics of MEMS mainly lays the foundation for its development and application. International micro-opto-mechatronic system technology just towards all-round development, it is a good time to develop this area in our country.