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为了研究表面演化过程的机理,提出了一种基于压缩表示的三维表面演化方法来模拟等离子体刻蚀工艺,并着重探讨了对离子刻蚀的仿真.为了解决三维元胞自动机内存需求量大的问题,该方法将二维数组和动态存储方式相结合,既实现元胞信息的无损压缩存储,又保持三维元胞间的空间相关性.实验结果也表明该方法不仅节省了大量内存,而且在高分辨率条件下查找离子初始碰撞的表面元胞效率较高,满足高分辨率仿真的要求.将该方法应用于实现刻蚀工艺三维表面仿真中,模拟结果与实验结果对比验证了该方法的有效性.
In order to study the mechanism of surface evolution, a three-dimensional surface evolution method based on compressive representation is proposed to simulate the plasma etching process, and the simulation of ion etching is emphatically discussed.In order to solve the problem of large memory requirement of 3D Cellular Automata This method not only realizes the lossless compression and storage of cellular information but also maintains the spatial correlation between three-dimensional cells, and the experimental results also show that this method not only saves a lot of memory, but also It is more efficient to find the surface cell with initial collisions of ions under high-resolution conditions and meet the requirements of high-resolution simulation.This method is applied to the three-dimensional surface simulation of the etching process, and the simulation results are compared with the experimental results to verify the method Effectiveness.