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分析了微细台阶面表面形貌测量可能会出现平滑或失真现象的根源 ,提出一种基于测量数据分析和数据处理的解决方法。此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。
The root cause of smoothness or distortion that may occur in the measurement of surface topography of micro step surfaces is analyzed. A solution based on measurement data analysis and data processing is proposed. This method has been successfully applied to the self-developed three-dimensional surface topography measurement system of diffractive optical element.