(项目资助号:50605012)1项目负责人及所在单位:闫永达,哈尔滨工业大学2起止年限:2007年1月～2009年12月3项目简介针对纳米电子器件对有序自组装纳米结构的迫切需求,建立了基于AFM的纳米机械刻划加工系统,采用分子动力学仿真方法研究了探针纳米机械刻划加工机理,深入研究了刻划方向、垂直载荷、进给量、样品材料等因素对加工结构深度、表面质量和精度的影响规律,最终加工出适用于调控自组装过程的二维和三维微纳结构。 (Project Grant No .: 50605012) 1 Project Leader and its unit: Yan Yongda, Harbin Institute of Technology 2 Starting and ending deadline: January 2007 to December 2009 3 Project Introduction Aims at the urgent need of nano-electronic devices for ordered self-assembled nanostructures , An AFM-based nano mechanical scribing system was established. The molecular dynamics simulation method was used to study the nano-mechanical scribing mechanism of the probe. The effects of scribing direction, vertical load, feed rate, sample material and other factors on processing Structure depth, surface quality and accuracy of the law, and ultimately processed for the regulation of self-assembly process of two-dimensional and three-dimensional micro-nano structure.