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建立描述CZ-Si系统中动量、热量和质量同时传递,且流固耦合的模型,数值模拟CZ法制备单晶硅等径过程中在热传导、热对流等因素耦合作用下的固液相变问题,给出相变界面形状的演变过程。计算结果表明,等径前期和中期相变界面形状变化主要是由于晶体散热的改变,后期则是由于熔体中自然对流和强迫对流关系的反转。从全局的角度分析改善界面形状的控制方法,提出变晶转制备工艺。
A model describing the simultaneous transfer of momentum, heat and mass, and fluid-structure coupling in CZ-Si system was established to simulate the solid-liquid phase transition problem under the coupling of heat conduction and convection , Gives the evolution of phase change interface shape. The calculation results show that the change of the shape of the phase change interface in the early and mid-phase is mainly due to the change of crystal heat dissipation, and the latter is due to the reversal of the natural convection and forced convection in the melt. From the overall point of view of the analysis to improve the control of the interface shape, the proposed change crystal preparation process.