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据SST杂志1992年2月号报导,尼康精密公司已于1991年后期推出一种大视场准分子激光步进机。这种型号为NSR—2005EX8A的新机器,是为大大提高生产率和开发0.5μm
According to a February SST magazine report in February 1992, Nikon Precision Inc. launched a large-field excimer laser stepper in late 1991. This new model NSR-2005EX8A is designed to greatly increase productivity and develop 0.5μm