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多晶硅薄膜具有较高的电迁移率和稳定的光电性能,是制备微电子器件、薄膜晶体管、大面积平板液晶显示的优质材料。多晶硅薄膜被公认为是制备高效、低耗、最理想的薄膜太阳能电池的材料。因此,如何制备多晶硅薄膜是一个非常有意义的研究课题。固相法是制备多晶硅薄膜的一种常用方法,它是在高温退火的条件下,使非晶硅薄膜通过固相相变而成为多晶硅薄膜。本文采用固相法,利用X-ray衍射及拉曼光谱,对用不同方法制备的非晶硅薄膜的晶化过程进行了系统地研究。
Polycrystalline silicon thin film with high mobility and stable photoelectric properties, is the preparation of microelectronic devices, thin-film transistors, large-area flat-panel liquid crystal display of high quality materials. Polysilicon film is recognized as the preparation of high efficiency, low consumption, the ideal thin film solar cell materials. Therefore, how to prepare polycrystalline silicon film is a very significant research topic. Solid phase method is a common method of preparing polycrystalline silicon thin film, which is made by polycrystalline silicon thin film through solid phase transformation under the conditions of high temperature annealing. In this paper, solid-phase method, the use of X-ray diffraction and Raman spectroscopy, crystallization of amorphous silicon thin films prepared by different methods were systematically studied.