论文部分内容阅读
,Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
【机 构】
：
School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024,China“
【出 处】
：
中国物理B（英文版）
【发表日期】
：
2012年7期
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