A new type of piezoelectric electro-hydraulic servo valve system was proposed. And then multilayer piezoelectric actuator based on new piezoelectric ceramic material was used as the electricity-machine converter of the proposed piezoelectric electro-hydraulic servo valve. The proposed piezoelectric electro-hydraulic servo valve has ascendant performance compared with conventional ones. But the system is of high nonlinearity and uncertainty, it cannot achieve favorable control performance by conventional control method. To develop an efficient way to control piezoelectric electro-hydraulic servo valve system, a high-precise fuzzy control method with hysteresis nonlinear model in feedforward loop was proposed. The control method is separated into two parts: a feedforward loop with Preisach hysteresis nonlinear model and a feedback loop with high-precise fuzzy control. Experimental results show that the hysteresis loop and the maximum output hysteresis by the PID control method are 4.22% and 2.11 μm, respectively; the hysteresis loop and the maximum output hysteresis by the proposed control method respectively are 0.74% and 0.37 μm, respectively; the maximum tracking error by the PID control method for sine wave reference signal is about 5.02%, the maximum tracking error by the proposed control method for sine wave reference signal is about 0.85%. A new type of piezoelectric electro-hydraulic servo valve system was proposed. And then piezoelectric actuator based on new piezoelectric ceramic material was used as the electricity-machine converter of the proposed piezoelectric electro-hydraulic servo valve. But the system is of high nonlinearity and uncertainty, it can not achieve favorable control performance by conventional control method. To develop an efficient way to control piezoelectric electro-hydraulic servo valve system, a high-precise fuzzy control method with hysteresis nonlinear model in feedforward loop was proposed. The control method is separated into two parts: a feedforward loop with Preisach hysteresis nonlinear model and a feedback loop with high-precise fuzzy control. Experimental results show that the hysteresis loop and the maximum output hysteresis by the PID control method are 4.22% and 2.11 μm, respectively; the hysteresis loop and the maximum output hysteresis by the proposed control method are 0.74% and 0.37 μm, respectively; the maximum tracking error by the PID control method for sine wave reference signal is about 5.02%, the maximum tracking error by the proposed control method for sine wave reference signal is about 0.85%.