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提出了在开发一种先进的直拉法晶体生长控制系统中占据重要地位的设备及工艺特征的下位机模型;分析所采集到的实验数据,揭示出控制中的重要问题,由此开发了一种新的控制结构;该模型是建立在常规控制结构和提出新的控制结构性能对比的基础上。
A model of the lower computer that occupies an important position in the development of an advanced Czochralski crystal growth control system is proposed. By analyzing the collected experimental data and revealing the important problems in the control, a A new control structure is built; this model is based on a comparison of the performance of a conventional control structure and a new control structure.