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在用热丝化学气相沉积法生长金刚石薄膜的过程中，具有活性的原子及原子团的输运是一个复杂的动态过程．对此过程提出了一个理论模型，着重研究衬底附近的活化气体原子团的比例随各参数的变化及其对金刚石生长的影响，从而求得在一定的参数空间内理想的金刚石生长区域，以指导金刚石外延的实践．
During the growth of diamond films by hot filament chemical vapor deposition, the transport of active atoms and radicals is a complex dynamic process. A theoretical model is proposed for this process, focusing on the variation of the atomic ratio of the activated gas near the substrate with each parameter and its influence on the growth of diamond, so as to obtain the ideal diamond growth region in a certain parameter space, Diamond epitaxial practice.