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对外差激光干涉仪中的非线性误差理论进行了综述,着重分析了一阶、二阶非线性误差的形成机理、非线性误差的大小及表现形式,并对非线性误差检测和补偿方法的研究进展进行了详细阐述和分析,指出了各类方法的应用特点,为开展这一方向的后续研究提供理论基础。
The theory of nonlinear error in heterodyne laser interferometer is reviewed. The forming mechanism of first and second order nonlinear errors, the size and manifestation of nonlinear error are analyzed emphatically. The methods of nonlinear error detection and compensation are also studied The progress has been elaborated and analyzed, and the application characteristics of various methods have been pointed out, which provide the theoretical basis for the follow-up research in this direction.