论文部分内容阅读
为了优化中小型圆形反射镜在加工、镀膜、装调等阶段的检测中所需的支撑结构,以V型块支撑工作原理设计了支撑位置及支撑点夹角均可调整的分体式支撑。利用有限元方法得到TMA系统中Φ136 mm非球面次镜面形随支撑点夹角的变化趋势,并根据趋势曲线,确定支撑点夹角为100°状态下,分体式支撑结构引起的镜面面形变化最小(RMS=0.57nm)。利用干涉仪结合补偿器的检测方式,对分体式支撑在不同的支撑点夹角下的镜面面形进行检测。所得结果与有限元方法得到的镜面面形随支撑点夹角变化趋势与试验结果相符,且在100°时分体式支撑引起的镜面面形变化(RMS=0.015 wave)明显优于其他角度。再以不同的镜坯材料及反射镜直径尺寸进行仿真对比,结果表明:镜面面形随支撑点夹角的变化趋势与反射镜材料和尺寸无关,趋势曲线幅值随材料弹性模量和反射镜直径改变而变化。优化得到的分体式支撑对于中小型圆反射镜具有广泛适用性。
In order to optimize the supporting structure of middle and small size circular mirror in the inspection of processing, coating and setting, the split support with adjustable supporting position and supporting angle was designed by working principle of V-block support. The changing trend of Φ1.6 mm aspherical sub-mirror shape with the supporting angle was obtained by using finite element method. According to the trend curve, the mirror-surface shape caused by the split supporting structure was determined under the condition of 100 ° supporting angle Min (RMS = 0.57nm). Using the detection method of the interferometer and the compensator, the mirror surface of the split support at the angle of different support points is detected. The obtained results are in good agreement with the experimental results. The change of the mirror surface shape (RMS = 0.015 wave) caused by the split support at 100 ° is obviously better than other angles. The results show that the trend of mirror surface shape with the angle of the support point is independent of the material and size of the mirror. The amplitude of the trend curve varies with the material modulus of elasticity and the reflection mirror Diameter changes. The optimized split support has wide applicability to small and medium circular mirrors.