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本文对铁镍铬合金表面的氧化膜,用俄歇电子能谱(AES)研究合金的表面组分,用Ar离子刻蚀得到合金组分随深度的变化,用X射线光电子能谱(ESCA),研究表面组成元素所处的化学状态。 研究了合金元素Cr、Ni、Fe、O峰的变化,发现不同的氧化工艺,Cr富集在合金表面层,在一定的温度范围内,氧化温度越高,Cr的富集似乎也越趋近表面。Ni在一定的表层范围,变化平坦,原子浓度低,以后逐渐增高。O峰与Cr峰有相似的变化趋势。Fe峰则相反,在富Cr区恰好对应着贫Fe区。 氧化膜的化学价态,从外层至内层,大体上由高价向低价氧化物过渡,Cr的氧化物是CrO_3、CrO_2和Cr_2O_3。外层Ni是Ni_2O_3,随后是NiO过渡到金属Ni。Fe的氧化物在表面有Fe OOH及Fe_2O_3,随着深度增加,依次出现Fe_2O_3、FeO和Fe。
In this paper, the surface composition of Fe-Ni-Cr alloy was studied by Auger electron spectroscopy (AES), and the variation of the alloy composition with depth was obtained by Ar ion etching. The X-ray photoelectron spectroscopy (ESCA) , Study the surface chemical composition of the chemical state. The variation of Cr, Ni, Fe and O peaks of alloying elements was investigated. It was found that different oxidation processes and Cr enrichment were observed on the surface of the alloy. At a certain temperature range, the higher the oxidation temperature, the closer the Cr enrichment surface. Ni in a certain range of surface changes, flat, atomic concentration is low, then gradually increased. O peak and Cr peak have a similar trend. On the contrary, the peak of Fe corresponds to the lean Fe zone in the Cr-rich zone. The chemical valence of the oxide film, from the outer layer to the inner layer, generally transits from the high price to the low cost oxide, and the oxides of Cr are CrO_3, CrO_2 and Cr_2O_3. The outer layer of Ni is Ni_2O_3, followed by the transition of NiO to metallic Ni. The oxide of Fe has Fe OOH and Fe 2 O 3 on the surface, and with the increasing of depth, Fe 2 O 3, FeO and Fe appear in turn.