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本文表述DF高能激光应用光学系统中作为共孔径分光元件而研制的三色分束器的光学性能,讨论了满足分光性能光学元件基片,镀膜材料选取,多层膜设计与制备技术,元件性能测试结果。得到在ZnSe基片背面未镀膜情况下三色分光膜性能:3.8μm波长带反射率大于99.6%,8~14μm红外波段透过率大于75%,可见光区0.64~0.92μm透过率大于50%,膜层通过了稳定性检验。
This paper presents the optical properties of a tricolor beamsplitter developed as a co-apertured beam splitter in the DF high-energy laser applied optical system. The optical properties of the optical element substrate, the choice of coating material, the design and fabrication of multilayer films, Test Results. The properties of the three color spectral films were obtained when the back of ZnSe substrate was uncoated. The reflectance of 3.8μm wavelength band was more than 99.6%, the transmittance of infrared band of 8 ~ 14μm was more than 75% and the visible region was 0.64 ~ 0.92μm Transmission rate greater than 50%, the film passed the stability test.