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四极质谱仪作为科学分析仪器中的高端产品,具有广泛的应用领域。仪器工作时需要处于高真空状态,同时还需从大气压下引入样品进行分析。本文采用两级梯度真空的设计方法对真空系统进行设计,解决了分析样品进样的真空过渡。通过流导、漏率等方面计算以及真空系统的要求确定了各真空元器件的结构形式和规格型号。最后,搭建真空系统进行了实验验证。
Quadrupole mass spectrometers, as high-end products in scientific analytical instruments, have a wide range of applications. Instruments need to work in a high vacuum, but also from the introduction of atmospheric pressure samples for analysis. In this paper, a two-stage gradient vacuum design method was used to design the vacuum system, which solved the vacuum transition of sample analysis. Through the conductance, leakage rate and other aspects of the calculation and the requirements of the vacuum system to determine the structure of the vacuum components and specifications models. Finally, set up a vacuum system for experimental verification.