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采用俄歇电子能谱、原子力显微镜、拉曼散射分析、傅里叶红外光谱和红外椭圆偏振光谱等设备 ,对射频等离子增强化学气相沉积法制备的掺氮类金刚石薄膜的微观结构和红外光学性能进行了研究 .结果表明 ,薄膜中氮含量随工艺中氮气 /甲烷流量比的增加而增加并趋于饱和 .光谱中 CH键吸收峰 (2 85 9～ 310 0 cm- 1 )逐渐消失 ,而且 CNH键(16 0 0 cm- 1 )、C≡ N键 (2 2 0 0 cm- 1 )和 NH键 (32 5 0 cm- 1 )对应的红外吸收峰强度随氮含量的增加而增加 .拉曼散射中G峰向小波数方向位移和峰值展宽的现象说明薄膜中形成了非晶的氮化碳结构 ,与原子力显微镜显示的薄膜中富氮的非晶纳米颗粒相对应 .偏振光谱分析认为 ,富氮纳米颗粒的存在导致了薄膜在红外波段折射率由 1.8降低到 1.6
The microstructure and infrared optical properties of nitrogen doped diamond films prepared by radio frequency plasma enhanced chemical vapor deposition were investigated by Auger electron spectroscopy, atomic force microscopy, Raman scattering analysis, Fourier transform infrared spectroscopy and infrared ellipsometry. The results show that the nitrogen content in the film increases and tends to be saturated with the increase of nitrogen / methane flow ratio in the process.The absorption peak of CH bond (2 859 ~ 310 0 cm-1) in the spectrum disappears gradually, and CNH The intensity of infrared absorption peak corresponding to the bond (16 0 0 cm -1), C≡N bond (2200 cm -1) and NH bond (32 50 cm -1) increased with the increase of nitrogen content. The phenomenon that G-wave shifts to the direction of wavelet and the peak broadens in the scattering indicates that amorphous carbonitride structure is formed in the film, corresponding to the nitrogen-rich amorphous nano-particles in the film displayed by atomic force microscope. The presence of nanoparticles led to the film in the infrared band refractive index decreased from 1.8 to 1.6