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应用二次电子发射,阴极荧光,束感生电导和束感生电压检验气相沉积氮化镓的表面和氮化镓发光二极管的横截面。氮化镓层是相同取向的微晶集合体。在绝缘层中锌的分布通常是不均匀的。高的内电场发生在绝缘层的两边。
The surface of the vapor-deposited gallium nitride and the cross-section of the gallium nitride light-emitting diode were examined using secondary electron emission, cathodic fluorescence, beam induced conductance and beam induced voltage. The gallium nitride layer is a microcrystalline aggregate of the same orientation. The distribution of zinc in the insulating layer is usually not uniform. High internal electric fields occur on both sides of the insulation.